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Conference Papers Year : 2015

Closed-Loop Autofocus Scheme for Scanning Electron Microscope

Abstract

In this paper, we present a full scale autofocus approach for scanning electron microscope (SEM). The optimal focus (in-focus) position of the microscope is achieved by maximizing the image sharpness using a vision-based closed-loop control scheme. An iterative optimization algorithm has been designed using the sharpness score derived from image gradient information. The proposed method has been implemented and validated using a tungsten gun SEM at various experimental conditions like varying raster scan speed, magnification at real-time. We demonstrate that the proposed autofocus technique is accurate, robust and fast.
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Dates and versions

hal-01241470 , version 1 (10-12-2015)

Identifiers

Cite

Le Cui, Naresh Marturi, Eric Marchand, Sounkalo Dembélé, Nadine Piat. Closed-Loop Autofocus Scheme for Scanning Electron Microscope. Int. Symp. of Optomechatronics Technology, ISOT 2015, Oct 2015, Neuchatel, Switzerland. ⟨10.1051/matecconf/20153205003⟩. ⟨hal-01241470⟩
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