Electronic sensor for pH measurements in nanoliters - Inria - Institut national de recherche en sciences et technologies du numérique Access content directly
Journal Articles Procedia Engineering Year : 2014

Electronic sensor for pH measurements in nanoliters

Abstract

An original design is proposed for the fabrication of an electronic sensor. The device consists on a field effect transistor (FET) combined with an integrated microfluidic channel and is devoted to charges detection in liquids. The technological process has been optimized. Fluidic inlet and outlet, performed by bulk micromachining, are located on the back side of the device. Electrical responses of the sensor are shown with different ambiances. Charge detection is validated thanks pH measurements. The sensors present high sensitivity associated to good electrical performances. Stability of the sensor is also presented and compared to nearby technologies
Fichier principal
Vignette du fichier
Electronic sensor for pH m.pdf (579.95 Ko) Télécharger le fichier
Origin : Publication funded by an institution
Loading...

Dates and versions

hal-01113824 , version 1 (03-03-2017)

Identifiers

Cite

Ismaïl Bouhadda, Olivier de Sagazan, France Le Bihan. Electronic sensor for pH measurements in nanoliters. Procedia Engineering, 2014, EUROSENSORS 2014, the 28th European Conference on Solid-State Transducers, 87, pp.915-918. ⟨10.1016/j.proeng.2014.11.304⟩. ⟨hal-01113824⟩
78 View
145 Download

Altmetric

Share

Gmail Facebook X LinkedIn More