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Conference Papers Year : 2009

Identification of electrostatically actuated mems models from real measurement data

Céline Casenave
Henri Camon

Abstract

This paper focuses on the identification of nonlinear dynamic models for physical systems such as Micro-Electro-Mechanical Systems (MEMS) from measurement data. The proposed approach consists in transforming, by means of suitable global operations, the specific input-output differential physical model of the system elaborated from physical analysis, in such a way that we get a new equivalent model formulation specifically adapted to the identification problem. Thanks to the equivalence of the dynamic model and the derived identification problem, the so-identified model remains of continuous-time type, with a clear physical meaning of any of its components, which is not the case when using, for example, black-boxes approaches. The method is implemented on real measurement data from a physical system.
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Dates and versions

hal-01061510 , version 1 (07-09-2014)

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Céline Casenave, Emmanuel Montseny, Henri Camon. Identification of electrostatically actuated mems models from real measurement data. 15th IFAC Symposium on System Identification, SYSID 2009, Jul 2009, Saint-Malo, France. pp.1738-1743, ⟨10.3182/20090706-3-FR-2004.00289⟩. ⟨hal-01061510⟩
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