High quality mechanical manufacturing of small components and subassemblies having geometric features in the micrometer range requires controlled and coordinated processes. Considering full automation of the production process as essential, not only manufacturing processes have to be optimized but also handling and quality assurance operations take an integral part of the production process. We outline requirements for handling and test operations in micro production and introduce a concept of an integrated micro process chain which meets the conditions and challenges in micro production process planning.