Positioning, Structuring and Controlling with Nanoprecision - Inria - Institut national de recherche en sciences et technologies du numérique Accéder directement au contenu
Communication Dans Un Congrès Année : 2010

Positioning, Structuring and Controlling with Nanoprecision

Résumé

Key industries such as the automotive, electronic, medical and laboratory technical industries have continually rising demands for precise manufacturing, handling and control techniques. This is true for the manufacture of injection nozzles for engines as indeed also for the irradiation of extremely fine wafer structures and in the field of scanning probe microscopy. Some examples from research and their industrial application which have been made available by NanoMat Network Partners will be highlighted in this presentation. For example the spontaneous structure formation at the nanoscale and the application as anti-reflection layers.
Fichier principal
Vignette du fichier
Paper_44_-_HEDDERICH.pdf (339.25 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)
Loading...

Dates et versions

hal-01055681 , version 1 (13-08-2014)

Licence

Paternité

Identifiants

Citer

Regine Hedderich, Tobias Heiler, Roland Gröger, Thomas Schimmel, Stefan Walheim. Positioning, Structuring and Controlling with Nanoprecision. 5th IFIP WG 5.5 International Precision Assembly Seminar (IPAS), Feb 2010, Chamonix, France. pp.222-226, ⟨10.1007/978-3-642-11598-1_26⟩. ⟨hal-01055681⟩
507 Consultations
120 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More