Calibration of Scanning Electron Microscope using a multi-images non-linear minimization process. - Inria - Institut national de recherche en sciences et technologies du numérique Access content directly
Conference Papers Year : 2014

Calibration of Scanning Electron Microscope using a multi-images non-linear minimization process.

Abstract

In this paper, a novel approach of SEM calibration based on non-linear minimization process is presented. The SEM calibration for the intrinsic parameters are achieved by an iterative non-linear optimization algorithm which minimize the registration error between the current estimated position of the pattern and its observed position. The calibration can be achieved by one image and multiple images of calibration pat- tern. Perspective and parallel projection models are addressed in this approach. The experimental results show the efficiency and accuracy of the proposed method.
Fichier principal
Vignette du fichier
ICRA14_0626_FI.pdf (235.45 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

hal-00992614 , version 1 (19-05-2014)

Identifiers

  • HAL Id : hal-00992614 , version 1

Cite

Le Cui, Eric Marchand. Calibration of Scanning Electron Microscope using a multi-images non-linear minimization process.. IEEE Int. Conf. on Robotics and Automation, ICRA'14, Jul 2014, Hong-Kong, Hong Kong SAR China. ⟨hal-00992614⟩
204 View
226 Download

Share

Gmail Facebook X LinkedIn More