Scanning Electron Microscope Calibration Using a Multi-Image Non-Linear Minimization Process - Inria - Institut national de recherche en sciences et technologies du numérique Access content directly
Journal Articles International Journal of Optomechatronics Year : 2015

Scanning Electron Microscope Calibration Using a Multi-Image Non-Linear Minimization Process

Abstract

A scanning electron microscope (SEM) calibrating approach based on non-linear minimization procedure is presented in this article 1. Both the intrinsic parameters and the extrinsic parameters estimations are achieved simultaneously by minimizing the registration error. The proposed approach considers multi-images of a multi-scale calibration pattern view from different positions and orientations. Since the projection geometry of the scanning electron microscope is different from that of a classical optical sensor, the perspective projection model and the parallel projection model are considered and compared with distortion models.
Fichier principal
Vignette du fichier
lcui_IntJOpt_revise-v1.pdf (223.91 Ko) Télécharger le fichier
Origin : Files produced by the author(s)
Loading...

Dates and versions

hal-01241405 , version 1 (10-12-2015)

Identifiers

Cite

Le Cui, Eric Marchand. Scanning Electron Microscope Calibration Using a Multi-Image Non-Linear Minimization Process. International Journal of Optomechatronics, 2015, 9 (2), pp.151-169. ⟨10.1080/15599612.2015.1034903⟩. ⟨hal-01241405⟩
314 View
374 Download

Altmetric

Share

Gmail Facebook Twitter LinkedIn More