The future Micro Electro-Mechanical Systems (MEMS) will involve high complex architectures. The design and the Electro-Magnetic simulation of those components require more and more computer mem- ory and computational time. Grid Computing allows to execute all possi- ble configurations of MEMS simulations. In this article, we consider the case of a phase shifter based on N Radio Frequency (RF) MEMS systems which creates 2N possible configurations. A free open source Transmis- sion Line Matrix (TLM) fullwave Electro-Magnetic solver, called YAT- PAC (Yet Another TLM Package), is used to simulate the MEMS. The extensions of YATPAC Simulation Package for an execution in grid con- text, and especially for the French experimental Grid Computing plat- form Grid'5000, are explained. The execution is done over several sites. A study of performance for deployment of code and data, execution time and recovery of results is commented to show the potential of TLM over a grid.