Trapping Biological Species in a Lab-on-Chip Microsystem: Micro Inductor Optimization Design and SU8 Process
Résumé
Micro-spiral inductor dedicated to microbeads
manipulation in a fluidic channel had been optimized by analytical
modelling correlated to multi physics fem numerical Maxwell®3D L
software. Main advantage of the analytical model described below is time
analysis calculus decrease of and the capability offered to optimize
geometrical and electrical parameters of the inductor. First
experimental results show a good correlation between simulation and
realized integrating micro-devices in a fluidic channel.
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