Thermodesorption mass spectrometry study of the adsorption of Sb on misoriented Si(111)
Résumé
Adsorption of Sb on a misoriented Si(111) surface is investigated by thermodesorption mass spectrometry (TD-MS). The spectra confirm the existence, in the submonolayer range, of new adsorption sites induced by the presence of steps, previously shown by Auger spectroscopy thermodesorption (TD-AES) and tentatively attributed, through simulations, to molecular adsorption at the steps rather than dissociative on the terraces. The present TD-MS measurements completely confirm this interpretation, and also give new information on the nature of the species leaving the surface (essentially Sb 2) and on their emission laws (orientational desorption).